화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.141, No.10, 2857-2859, 1994
Mg Content Dependence of the Electromigration Resistance of Fine-Grained Al-Si Alloys
This paper describes fine-grained Mg containing Al-Si alloys, which have an electromigration resistance as much as an order of magnitude higher than that of conventional Al-Si alloys. Films 1 to 8 mum wide made from those fine-grained metal systems, with an average grain size under 0.26 mum, have lifetimes that are independent of linewidth.