화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.142, No.11, 3889-3892, 1995
Electrochemically Deposited Cobalt Thin-Films on P-Type Silicon and Its Characterization
Using a electrochemical method, cobalt films were deposited on {100} and {111} surfaces of silicon single crystals (p-type, boron-doped). The film deposits were uniform over the entire surface. X-ray diffraction experiments showed the presence of the face-centered cubic (fcc) and the hexagonal closed-packed (hcp) cobalt structures in the films.