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Journal of the Electrochemical Society, Vol.143, No.4, L73-L75, 1996
Electrochemical Deposition of Pd, Ti, and Ge for Applications in GaAs Technology
The electrolytic deposition of Pd, Ti, and Ge is demonstrated. A process for depositing smooth surfaces of layers from 10 to 100 nm and thicker is described. Applications of this technology for Schottky and ohmic contacts are shown and the advantages to similar evaporated metallization schemes are listed.