An extensive study of capillary flow of fluids with various viscosities in straight and periodically constricted microchannels with different surface wettability is presented. Capillary filling speed in hydrophilic, less hydrophilic, and hydrophobic microchannels were experimentally monitored and compared with the Washburn theoretical model. For all liquids, a linear relationship was found between the square of propagation distance and time, which is expected for Newtonian fluids. Experimental results indicated slower velocity compared to the theoretical prediction due to simplifications of the Washburn model. Capillary filling speed of fluids into long-fluororinated chain silane modified channels confirmed the expected lyophobic nature of the coating (i.e., not favorable for either hydrophilic or hydrophobic liquids). Presence of the precursor film ahead of the three-phase contact line in the microscopic level was demonstrated. White light and fluorescent images confirmed the presence of precursor film and capillary evaporation at the interface. Evaporation enhanced the deviation between experimental and theoretical results due to continuous wettability alteration of penetrating fluid.