화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.145, No.2, 498-502, 1998
In situ characterization of the p-Si/NH4F interface during dissolution in the current oscillations regime
Several physicochemical properties of the p-Si/NH4F interface have been monitored by in situ techniques in the regime of current oscillations. Comparison of evolution of infrared absorption, microwave reflectivity, electrode admittance, electron injection rate shows interesting correlations. An integrated description of the processes involved is attempted on the basis of the current models for the Si/acidic fluoride interface.