화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.145, No.5, 1692-1695, 1998
Segregation of oxygen at a solid/liquid interface in silicon
The incorporation of oxygen into silicon single crystals from the melt is examined in terms of an experiment and a model on a transient solidification. A transient analysis offered an effective segregation coefficient of oxygen in silicon and a diffusion constant of oxygen in the melt almost independently. The analysis estimated these values of effective segregation coefficient of oxygen in silicon and diffusion constant of oxygen in the melt.