Journal of the Electrochemical Society, Vol.145, No.5, 1692-1695, 1998
Segregation of oxygen at a solid/liquid interface in silicon
The incorporation of oxygen into silicon single crystals from the melt is examined in terms of an experiment and a model on a transient solidification. A transient analysis offered an effective segregation coefficient of oxygen in silicon and a diffusion constant of oxygen in the melt almost independently. The analysis estimated these values of effective segregation coefficient of oxygen in silicon and diffusion constant of oxygen in the melt.
Keywords:CZOCHRALSKI SILICON;GROWTH