Microchip sensor of PdO-NiO electrode for H2O2 sensing fabricated with the UV photolithography

Yong Seok Kim; Tae Kyong Yoo; Chan-Hwa Chung

Korean Journal of Chemical Engineering, Vol.37, No.10, 1810-1820, October, 2020

DOI10.1007/s11814-020-0581-7 Export Citation

Microchip sensor of PdO-NiO electrode for H2O2 sensing fabricated with the UV photolithography

Yong Seok Kim, Tae Kyong Yoo, and Chan-Hwa Chung^†

School of Chemical Engineering, Sungkyunkwan University, Suwon 16419, Korea

E-mail:

An electrochemical microchip sensor was fabricated through the photolithographic process. The metal paste used in the micro-pattern of the sensor chip contained dendritic and spherical Ag-coated Cu powders, which decreased the electrical resistance of the pattern down to 25.69Ω·cm by forming a network for electron transfer between particles. The electrode materials were dendritic palladium oxide-nickel oxide powders that showed dramatically high surface area. Also, a synergetic effect on the sensing performance between palladium oxide and nickel oxide was observed. The formation of micro-pattern was investigated through optical microscope and field-emission scanning electron microscope. The body resistance of the conductive paste was calculated using the 4-point probe technique, and the electrochemical characteristics of the sensor were analyzed by cyclic voltammetry and chronoamperometry. The fabricated sensor chip exhibited sensing performance for hydrogen peroxide detection with high sensitivity of 641.75 μA mM-1 cm-2 in a dynamic range between 50 μM and 13mM. Its long-term stability and high selectivity were also confirmed.

Keywords:Microsensor Chip;Silver-coated Copper;Photolithography;Hydrogen Peroxide;Palladium Oxide-nickel Oxide

[References]

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[2] Cinti S, Arduini F, Moscone D, Palleschi G, Killard AJ, Sensors, 14, 14222 (2014)

[3] Mujeeb-U-Rahman M, Adalian D, Scherer A, J. Nanotechnology, 2015, 1 (2015)

[4] Moya A, Gabriel G, Villa R, del Campo FJ, Curr. Opin. Electrochem., 3, 29 (2017)

[5] Hughes G, Westmacott K, Honeychurch KC, Crew A, Pemberton RW, Hart JP, Biosensors, 6, 29 (2016)

[6] Couto RAS, Lima JLFC, Quinaz MB, Talanta, 146, 801 (2016)

[7] Katseli V, Economou A, Kokkinos C, Electrochem. Commun., 103, 100 (2019)

[8] Kim S, Park JH, Kang K, Park CO, Park I, J. Micromech. Microeng., 25, 015002 (2015)

[9] Kim CK, Lee GJ, Lee MK, Rhee CK, Powder Technol., 263, 1 (2014)

[10] Hai HT, Ahn JG, Kim DJ, Lee JR, Chung HS, Kim CO, Surf. Coat. Technol., 201, 3788 (2006)

[11] Nishikawa H, Mikami S, Miyake K, Aoki A, Takemoto T, Mater. Trans., 51(10), 1785 (2010)

[12] Djokic SS, Djokic NS, J. Electrochem. Soc., 158(4), D204 (2011)

[13] Liu J, Zeng X, J. Mater. Res., 27, 1853 (2012)

[14] Zhuo K, An CY, Kannan PK, Seo N, Park YS, Chung CH, Korean J. Chem. Eng., 34(5), 1483 (2017)

[15] Zhao J, Zhang D, Zhao J, J. Solid State Chem., 184, 2339 (2011)

[16] Park YS, An CY, Kannan PK, Seo N, Zhuo K, Yoo TK, Chung CH, Appl. Surf. Sci., 389, 865 (2016)

[17] Zhang Y, Wilson GS, J. Electroanal. Chem., 345, 253 (1993)

[18] Zhang S, Han L, Hou C, Li C, Lang Q, Han L, Liu A, J. Electroanal. Chem., 742, 84 (2015)

[19] Zhang T, Yuan R, Chai Y, Li W, Ling S, Sensors, 8, 5141 (2008)

[20] Saha P, Maharajan A, Dikshit PK, Kim BS, Korean J. Chem. Eng., 36(12), 2143 (2019)

[21] Ojani R, Raoof JB, Norouzi B, Int. J. Electrochem. Sci., 7, 1852 (2012)

[22] Zhu L, Zheng Y, Jian J, Ionics, 21, 2919 (2015)

[23] Lee J, Sharma D, Lim Y, Shin H, Sens. Actuators B-Chem., 267, 467 (2018)

[24] Kim J, Oh SY, Park JY, Kim Y, Korean J. Chem. Eng., 33(1), 344 (2016)

[25] Ah CY, Zhuo K, Kim WJ, Chung CH, Sens. Actuators B-Chem., 213, 329 (2015)

[26] Smits FM, Bell Syst. Tech. J., 37(3), 711 (1958)

[27] Zhang YQ, Yang WX, Wang YZ, Jia JB, Wang JG, Microchim. Acta, 180, 1085 (2013)

[28] Vijayakumar S, Nagamuthu S, Muralidharan G, ACS Appl. Mater. Interfaces, 5, 2188 (2013)

[29] Ren B, Fan MQ, Liu Q, Wang J, Song DL, Bai XF, Electrochim. Acta, 92, 197 (2013)

[30] Chen CS, Pan FM, J. Power Sources, 208, 9 (2012)

[31] Barroso-Quiroga MM, Castro-Luna AE, Int. J. Hydrog. Energy, 35(11), 6052 (2010)

[32] Kurowska E, Brzozka A, Jarosz M, Sulka GD, Jaskuła M, Nanotechnology, 23, 7 (2012)

[33] Zhu X, Niu X, Zhao H, Lan M, Sens. Actuators B-Chem., 195, 274 (2014)

[34] Zheng J, Diao J, Jin Y, Ding A, Wang B, Wu L, Weng B, Chen J, J. Electrochem. Soc., 165, 5 (2018)

[35] Stromberg LR, Hondred JA, Sanborn D, Mendivelso-Perez D, et al., Microchim. Acta, 186, 533 (2019)

[36] Shi L, Layani M, Cai X, Zhao H, Magdassi S, Lan M, Sens. Actuators B-Chem., 256, 938 (2018)