화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.12, No.1, 148-152, 1994
Mo-Si Multilayer as Soft-X-Ray Mirrors for the Wavelengths Around 20 nm Region
Molybdenum-silicon multilayer soft x-ray mirrors have been fabricated using a magnetron sputtering system. Their structures have been characterized by x-ray diffraction and reflectivities at normal incidence have been measured by using monochromatized synchrotron radiation in the 18-24 nm region. A normal incidence reflectivity as high as 40% at 20.8 nm was achieved.