Flame synthesis is a powerful and scalable method for generating nanoparticles for a wide range of applications. The chemical interaction of the flame and the precursor combined with the spatial and temporal temperature distribution determine the product properties. For controlled nanoparticle synthesis that can also be scaled to industrial production rates, detailed knowledge of the underlying chemical kinetics and their interaction with the reactive flow is essential. Laser diagnostics has the capability to analyze the process by probing the concentration of important intermediates in shock tubes and reactive flows. The gas-phase synthesis of silica nanoparticles from SiCl4 in a premixed H-2/O-2 low-pressure flame reactor is studied by laser-induced fluorescence imaging of SiO mole fractions and temperature. The literature value-based spectroscopy model of SiO used for fitting the LIF spectra are validated based on absorption cross-sections measurements in a shock tube, where SiO is formed under precisely defined conditions (temperature, pressure, mole fraction) using a well-known kinetics mechanism for SiH4/CO2/Ar decomposition. Based on literature sources, a reaction mechanism is assembled to describe the oxidation of SiCl4 in the flame, which is then compared to the measured SiO mole fractions distribution to shed light on the current state of the understanding of SiCl4 combustion chemistry and to direct further refinements. (C) 2020 The Author(s). Published by Elsevier Inc. on behalf of The Combustion Institute.