화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.12, No.5, 2825-2829, 1994
Buried Reconstruction Inhibition of Solid-Phase Epitaxy of Ge on Si(111)
We study the epitaxial crystallization of a thin film of amorphous Ge deposited at room temperature on Si (111). Silicon surface features which are buried beneath the Ge film are seen to affect the rate of crystallization. In particular, solid phase growth is observed to be enhanced at surface steps and defects in the surface reconstruction. We demonstrate that control of Ge crystallization morphology is possible through manipulation of Si surface structure.