Journal of Vacuum Science & Technology A, Vol.12, No.5, 2931-2932, 1994
Observation of Cryopump Fluorescence During Operation of Electron-Beam Evaporator
A blue-green glow was observed in the cold-plate section of a conventional cryogenic pump used in a vacuum-deposition chamber. The fluororescence is associated with operation of an electron-beam evaporator and is present at all gas pressures and evaporator voltages used, but cannot be made to occur during operation of a 1 kV Kaufman-type ion source or a 3 kV electron source.