화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.12, No.5, 2940-2942, 1994
Simple Pulsed-Plasma-Beam Gun for Ultrahigh-Vacuum Applications
A simple pulse-operated plasma gun, which is a combination of a pulsed-solenoid valve and an electrode to induce an electric discharge in gas at the outlet is described. The performance of the pulsed-plasma-beam gun was tested by carrying out hydrogen-plasma deoxidization of a GaAs wafer.