Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3157-3164, 1994 DOI10.1116/1.579231 Export Citation Intrinsic Resputtering During Film Deposition Investigated by Monte-Carlo Simulation Bauer W, Betz G, Bangert H, Bergauer A, Eisenmengersittner C Keywords:SPUTTERED PARTICLE FLUXES;ENERGY-DISTRIBUTIONS;THERMALIZATION;FORMULA;ATOMS Please enable JavaScript to view the comments powered by Disqus.
