Journal of Vacuum Science & Technology A, Vol.13, No.1, 35-41, 1995
Adsorption and Decomposition of Dichlorosilane on Porous Silicon Surfaces
Keywords:CHEMICAL VAPOR-DEPOSITION;HYDROGEN DESORPTION-KINETICS;MOLECULAR LAYER EPITAXY;SI(111)-(7X7) SURFACE;REDUCED PRESSURE;SPECTROSCOPY;DISILANE;SI(100);GROWTH;SI(111)7X7