Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.2, 268-275, 1995 Export Citation Effects of Water Partial-Pressure on the Activated Electron-Beam Evaporation Process to Deposit Tin-Doped Indium-Oxide Films Shigesato Y, Yasui I, Hayashi Y, Takaki S, Oyama T, Kamei M Keywords:IMPACT DISSOCIATION;LARGE-SCALE;SPECTROSCOPY;OXYGEN;DIAMOND;PLASMA;SUBSTRATE;HYDROGEN Please enable JavaScript to view the comments powered by Disqus.
