Journal of Vacuum Science & Technology A, Vol.13, No.2, 368-380, 1995
Global-Model of Ar, O-2, Cl-2, and Ar/O-2 High-Density Plasma Discharges
Keywords:CYCLOTRON RESONANCE PLASMA;IMPACT CROSS-SECTIONS;GLOW-DISCHARGES;IONIZATION;KINETICS;ATOMS;RARE;ION;CO