Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.2, 389-393, 1995 DOI10.1116/1.579369 Export Citation Optimized Magnetic-Field Shape for Low-Pressure Magnetron Sputtering Kadlec S, Musil J Keywords:TIN FILMS;SYSTEMS Please enable JavaScript to view the comments powered by Disqus.
