Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.2, 497-500, 1995 DOI10.1116/1.579387 Export Citation Low Outgassing Residual-Gas Analyzer with a Beryllium-Copper-Alloy-Flanged Ion-Source Watanabe F, Kasai A Please enable JavaScript to view the comments powered by Disqus.
