Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 503-508, 1995 DOI10.1116/1.579774 Export Citation Vacuum Gauging with Complementary Metal-Oxide-Semiconductor Microsensors Paul O, Brand O, Lenggenhager R, Baltes H Please enable JavaScript to view the comments powered by Disqus.
