Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 524-530, 1995 DOI10.1116/1.579778 Export Citation Enhancement of Hydrogen Pumping by Injecting Fluorine into the Exhaust System of Turbomolecular Pumps Ogure N, Shibata A, Ono K, Hayasaka N, Okano H, Okumura K Please enable JavaScript to view the comments powered by Disqus.
