Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 629-635, 1995 DOI10.1116/1.579797 Export Citation Optical Wave-Guides on Silicon Chips Yokoyama S, Nagata T, Kuroda Y, Doi T, Namba T, Miyake K, Miyamoto T, Miyazaki S, Koyanagi M, Hirose M Keywords:SYSTEMS;DEVICES;NITRIDE Please enable JavaScript to view the comments powered by Disqus.
