Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 740-744, 1995 DOI10.1116/1.579818 Export Citation Real-Time Spectroscopic Ellipsometry Monitoring of Si1-xGex/Si Epitaxial-Growth Pickering C, Hope DA, Carline RT, Robbins DJ Keywords:IN-SITU;ALXGA1-XAS Please enable JavaScript to view the comments powered by Disqus.
