Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 831-833, 1995 DOI10.1116/1.579836 Export Citation Synergistic Sputtering Effects During Ion-Bombardment with 2 Ion Species Berg S, Katardjiev IV Keywords:SELECTIVE DEPOSITION;AMPLIFICATION Please enable JavaScript to view the comments powered by Disqus.
