Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 843-848, 1995 DOI10.1116/1.579839 Export Citation Radio-Frequency Hollow-Cathode Discharge for Large-Area Double-Sided Foil Processing Korzec D, Schott M, Engemann J Keywords:PLASMA;DEPOSITION;SYSTEM;BEAMS;FILMS;CF4 Please enable JavaScript to view the comments powered by Disqus.
