Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 972-978, 1995 DOI10.1116/1.579660 Export Citation Defect Production and Recombination During Low-Energy Ion Processing Kellerman BK, Floro JA, Chason E, Brice DK, Picraux ST, White JM Keywords:MOLECULAR-BEAM EPITAXY;GE;SURFACE;GROWTH Please enable JavaScript to view the comments powered by Disqus.
