Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 983-989, 1995 DOI10.1116/1.579662 Export Citation The Design, Performance, and Application of an Atomic-Force Microscope-Based Profilometer Mceachern RL, Moore CE, Wallace RJ Keywords:INSTABILITY EXPERIMENTS;LASER Please enable JavaScript to view the comments powered by Disqus.