Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1008-1012, 1995 DOI10.1116/1.579389 Export Citation Composition and Morphology of a MgF2/Al Multilayer Thin-Film Reflective Coating Weimer JJ, Kim J, Zukic M, Torr DG Keywords:THICKNESS MEASUREMENT;OPTICAL-CONSTANTS;ALUMINUM FILMS;ELLIPSOMETRY Please enable JavaScript to view the comments powered by Disqus.