Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1121-1127, 1995 DOI10.1116/1.579597 Export Citation Characterization of Aluminum-Based Oxide Layers Formed by Microwave Plasma Katztsameret Z, Raveh A Keywords:REFLECTION-ABSORPTION;FILMS;ALLOY;SPECTROSCOPY;OXIDATION;OXYGEN Please enable JavaScript to view the comments powered by Disqus.
