Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1234-1238, 1995 DOI10.1116/1.579867 Export Citation Strain Imaging Analysis of Si Using Raman Microscopy Ajito K, Sukamto JP, Nagahara LA, Hashimoto K, Fujishima A Keywords:STRESS;SPECTROSCOPY;SILICON;MICROPROBE Please enable JavaScript to view the comments powered by Disqus.
