Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1293-1298, 1995 DOI10.1116/1.579553 Export Citation Quantitative Depth Profiling of Oxygen in Homoepitaxial SrTiO3 Films Watamori M, Oura K, Nakamura T Keywords:YBA2CU3OX THIN-FILMS;ION-BEAM ANALYSIS;SURFACE-LAYERS;BACKSCATTERING;RESONANCE Please enable JavaScript to view the comments powered by Disqus.