Journal of Vacuum Science & Technology A, Vol.13, No.3, 1461-1468, 1995
Surface-Chemistry of Diethylsilane and Diethylgermane on Ge(100)
Keywords:ATOMIC-LAYER EPITAXY;GE;ADSORPTION;HYDROGEN;KINETICS;SILICON;SI(100);DECOMPOSITION;DESORPTION;SI(001)