Journal of Vacuum Science & Technology A, Vol.13, No.3, 1709-1713, 1995
Soft-X-Ray Photoelectron-Spectroscopy Study of the Reaction of Xef2 with GaAs
Keywords:CORE-LEVEL PHOTOEMISSION;THIN-FILMS;CF4 PLASMA;SURFACE;FLUORINE;SILICON;LAYER;GAAS(110);PRODUCTS;REMOVAL