Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1802-1807, 1995 DOI10.1116/1.579772 Export Citation A Model-Based Technique for Real-Time Estimation of Absolute Fluorine Concentration in a CF4/Ar Plasma Hanish PD, Grizzle JW, Giles MD, Terry FL Keywords:OPTICAL-EMISSION ACTINOMETRY;DISCHARGES;SILICON;ABSORPTION;SIMULATION;REACTOR;CF-4;SI Please enable JavaScript to view the comments powered by Disqus.
