Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.14, No.1, 258-259, 1996 DOI10.1116/1.579930 Export Citation Design of a Magnetron Sputter Source with Soft-X-Ray Monitoring Capabilities Edart S, Dauchot JP Keywords:EMISSION-SPECTROSCOPY;CHEMICAL-ANALYSIS;DEPOSITION Please enable JavaScript to view the comments powered by Disqus.
