화학공학소재연구정보센터
홈 로그인 로그아웃 연락처 사이트맵
Macromolecular Research, Vol.29, No.4, 313-320, April, 2021
DOI10.1007/s13233-021-9035-2  Export Citation
Advanced Side-Impermeability Characteristics of Fluorinated Organic-Inorganic Nanohybrid Materials for Thin Film Encapsulation
Hyeok-jin Kwon, Jisu Hong, Hong Nhung Le1, Cheolmin Jung2, Chan Eon Park, Hong Chul Moon3, †, Juyoung Kim1, †, and Se Hyun Kim2, †
  • Department of Chemical Engineering, Pohang University of Science and Technology, Pohang 37673, Korea
  • 1Department of Advanced Materials Engineering, Kangwon National University, Samcheok 25931, Republic of Korea
  • 2School of Chemical Engineering, Yeungnam University, Gyeongsan 38541, Korea
  • 3Department of Chemical Engineering, University of Seoul, Seoul 02504, Korea
E-mail:, ,
In this study, we introduce a sol-gel based fluorinated nanohybrid materials named FAGPTi to fabricate organic-inorganic hybrid thin film encapsulation (TFE) with plasma-enhanced atomic layer deposition (PEALD)-based Al2O3 for optoelectronics. A systematic analysis of the FAGPTi film on various substrates reveals that the FAGPTi films fully covered all parts of the substrate, showing low roughness, high hydrophobicity, and good flexibility. These results demonstrate that FAGPTi is able to protect water corrosive Al2O3 from the outer invasion of moisture or water. Therefore, the TFE with alternatively stacked Al2O3 and FAGPTi shows excellent barrier film performance as low as 6.33 × 10-5 g m-2 day-1s at accelerated conditions (60 °C and 90% RH) and high visible transmittance above 95% in four pairs. In particular, the FAGPTi films displayed advanced side impermeability, with values comparable to those of the oxide layer. Thus, we expect our systematic work with FAGPTi layers to provide insights into barrier films to advance their integration in flexible optoelectronic devices and thereby accelerate their commercialization.
Keywords:thin film encapsulation (TFE);plasma-enhanced atomic layer deposition (PEALD);sol-gel;fluorinated;organic-inorganic nanohybrid materials;side permeation
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