A new cationic-lipid/siRNA particle that was designed to deliver siRNA was investigated by the combination of small-angle X-ray scattering (SAXS), asymmetric field flow fractionation coupled with multiangle light scattering, and cryotransmission electron microscopy (cryo-TEM). The particle was prepared through two-step mixing using a microfluidic technique. In the first step, siRNA was premixed with a cationic lipid in an EtOH-rich solution. In the second step, the premixed solution was mixed with other lipids, followed by solvent exchange with water. SAXS showed formation of a siRNA/cationic lipid pair in the first step, and this pair consisted of the major part of the core in the final particle. The relationship between the hydrodynamic radius and the radius of gyration indicated the formation of a densely packed core and PEG-rich shell, confirming a well-known core-shell model. SAXS and cryo-TEM showed that the ordering of the core structure enhanced as the siRNA content increased.