Journal of Vacuum Science & Technology A, Vol.14, No.4, 2122-2126, 1996
Analysis of Pulse-Time Modulated High-Density Discharges
Time modulation of the input power has been used recently to improve processing rates and etch selectivity in high-density discharges. Plasma characteristics of a pulse-time modulated high-density discharge is investigated here with the aid of a spatially averaged model. The model consists of mass and energy conservation equations for neutral and ionic species. Results are presented for chlorine and CF4 discharges for a range of pulse periods and duty ratios.