Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.14, No.4, 2674-2676, 1996 DOI10.1116/1.580002 Export Citation Hollow-Cathode Assisted Sputtering Backhouse CJ, Dew SK, Brett MJ Keywords:PLANAR MAGNETRON;ATOMS Please enable JavaScript to view the comments powered by Disqus.
