Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.14, No.5, 2965-2967, 1996 DOI10.1116/1.580253 Export Citation Extended Operation of a Wide-Range, All-Magnetic Bearing Turbomolecular Pump Without Backing Thompson JR, Weber PM, Hellmer R Please enable JavaScript to view the comments powered by Disqus.
