화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.2, 374-376, 1997
New Aspects of K Promoted Nitridation of the InP(100) Surface
The effect of molecular nitrogen exposure on the InP(100) surface modified by the alkali metal K overlayer is investigated by core-level photoemission spectroscopy using synchrotron radiation. The alkali metal covered surface exhibits reasonable nitrogen uptake at room temperature, and results in the formation of a P3N5 nitride complex. Flash annealing at 400 degrees C greatly enhanced the formation of this kind of nitride complex. Above 500 degrees C, the nitride complex dissolved completely.