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Journal of Vacuum Science & Technology A, Vol.15, No.2, 439-442, 1997
Surface-Reactions of Ge Chemical-Vapor-Deposition Using Diethylgermane
Keywords:THERMAL-DECOMPOSITION;SI(111) 7X7;ADSORPTION;SI(100);SILICON;DIETHYLSILANE;ENHANCEMENT;GERMANIUM;EPITAXY;GROWTH