Journal of Vacuum Science & Technology A, Vol.15, No.3, 465-469, 1997
Nondestructive Depth Profiling in Auger-Electron Spectroscopy by Means of Partial Intensity Analysis
A recently developed method to gain information on the near-surface compositional depth profile via analysis of the spectral line shape of Auger or x-ray photoelectrons has been tested, Electron-excited Auger spectra of a series of thin Au films on a Pt substrate have been subjected to this so-called partial intensity analysis. The overlap of the MNN Auger lines of Pt and Au gives rise to quite complex spectra. Subjecting these spectra to a partial intensity analysis reveals that the Au is present as a homogeneous overlayer. The overlayer thickness provided by the analysis is in good agreement with the values expected from the sample preparation,