화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.3, 759-762, 1997
Application of a High Critical-Temperature Superconductor Bearing for High-Vacuum Measurement
A novel and ultrahigh vacuum compatible, high critical temperature superconductor suspension is described in its application to a rotating disc vacuum gauge. The noncontacting and robust suspension comprises a permanent magnet (and attached disc) suspended freely in a vacuum and below a liquid nitrogen cooled YBa2Cu3O7 pellet which is held outside the vacuum chamber. This configuration supersedes a fiber suspension. Molecular torque developed from a high speed disc accelerates the suspended disc and facilitates a measurement of total pressure. The offset of the superconductor suspension (analogous to that of the spinning rotor gauge) is about 5 x 10(-6) mbar, nitrogen equivalent. After 50 h the offset reduced by up to 21% of its initial value. In the range 1.6 x 10(-3)-3.6 x 10(-6) mbar, the pressure measured using this device was within +/- 20% of that measured by a spinning rotor gauge; at lower pressures the agreement with an ionization gauge degraded to +/- 80%. Improvements in pellet structure reduce internal losses in the bearing and in the offset term, by a factor of 10, and should enable measurements in ultrahigh vacuum.