화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.3, 1246-1249, 1997
Electrostatically Actuated Micromechanical Switches
Micromechanical switches and relays realized by a simple surface micromachining process are presented. The devices use a nickel cantilever beam and gold-to-gold electrical contact, and are electrostatically actuated. They have lifetimes exceeding 10(9) cycles, and a current handling capability of 150 mA.