화학공학소재연구정보센터
Journal of Vacuum Science & Technology A, Vol.15, No.4, 2452-2454, 1997
Improved Design for an Aluminum Evaporator
The design of a previously described aluminum evaporator is improved in several important aspects. Special attention is paid to features which permit a thorough degassing procedure. The possibility of determining the temperature of the source in the current setup is important for the reproducibility and stability of the evaporator over a wide range of flux rates.