Hazard identification and analysis is an important step in the process safety assessment/management in the modern process industry. For hazard identification, real-time monitoring of process operations plays a critical role to establish required safety measures. In this paper, a novel locality preserving randomized canonical correlation analysis (LPRCCA) method is proposed for real-time nonlinear process monitoring. The basic idea is to map the original data onto a randomized low-dimensional feature space through random Fourier feature map, and then integrate the local geometric structure information to improve data mining performance. On the basis of explicit low-dimensional random Fourier features, the computational cost of the online feature extraction is dramatically reduced. The proposed LPRCCA method is significantly more favorable than kernel-based methods for nonlinear process monitoring. The applicability and effectiveness of the proposed process monitoring scheme are verified through a numerical example and an industrial benchmark of the Tennessee Eastman process (TEP) by the comparisons with other relevant methods. (C) 2021 Institution of Chemical Engineers. Published by Elsevier B.V. All rights reserved.