The roles of ion irradiation for crystalline growth and internal stresses in Ni films prepared by the ion beam and vapor deposition method were studied. Ni films were prepared on Si(100) wafers by evaporation of Ni metal and simultaneous irradiation with inert gas ions, Ne, Ar, Kr, and Xe. The energies of inert gas ions were changed in the range of 0.5-10.0 keV. Transport ratios of vaporized Ni atoms to inert gas ions to substrates were kept at 15. Ion beam current densities and ion irradiation directions were fixed at 40 mu A/cm(2) and perpendicular to the substrate surface, respectively. From the x-ray analyses, crystallinities and preferred orientation were changed by ion irradiation conditions. On the other hand, internal stresses were also changed from compressive to tensile depending on ion energies and ion species. It is understood that the variations of crystalline growth and internal stresses in Ni films were caused by the difference of nuclear and electronic energy transfer abilities of irradiating ions.