Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.16, No.1, 200-202, 1998 DOI10.1116/1.580970 Export Citation Characterization of thin, transparent and conductive TiN films prepared by radio frequency sputtering Kawamura M, Abe Y, Sasaki K Keywords:DIFFUSION BARRIER;SPECTRA;ZRN Please enable JavaScript to view the comments powered by Disqus.
