Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.16, No.1, 207-207, 1998 DOI10.1116/1.580973 Export Citation Early nitriding stage of evaporated-Ti thin films by N-ion implantation (vol 15, pg 1848, 1997) Kasukabe Y, Takeda S, Fujino Y, Yamada Y, Nagata S, Kishimoto M, Yamaguchi S Please enable JavaScript to view the comments powered by Disqus.
