Carbon films grown by KrF and ArF laser ablation of graphite were characterized by means of Raman and reflection high energy electron diffraction (RHEED) spectroscopies. Though Raman spectra of these films show only a weak characteristic peak of diamond, the existence of the diamond phase could be confirmed by RHEED measurements. It was found that the ArF laser grown films possess a trace of diamond phase or that these films at the threshold conditions for crystallization.